ISO 19685:2017
Vacuum technology — Vacuum gauges — Specifications, calibration and measurement uncertainties for Pirani gauges
ISO 19685:2017 identifies parameters of Pirani gauges, their calibration procedure, and describes measurement uncertainties to be considered when operating these gauges.
ISO 19685:2017 applies to Pirani vacuum gauges operating over a pressure range of 0,01 Pa to 150 kPa.
ISO 19685:2017 complements ISO 3567 and ISO 27893 when calibrating Pirani gauges and using them as reference standards.
In addition, ISO 19685:2017 defines procedures to characterize Pirani gauges for response time and hysteresis.
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Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 Symbols and abbreviated terms
5 Principle of Pirani gauge
6 Specifications for Pirani gauge
6.1 General
6.2 Measuring principle
6.3 Type of output
6.4 Range of output and output display resolution
6.5 Measurement range and full scale
6.6 Expected measurement uncertainty
6.7 Material exposed to gas
6.8 Connecting flange
6.9 Interface and pin-connections
6.10 Warm-up period
6.11 Compatibility between gauge tube and controller
6.12 Normal operating (environment) conditions
6.13 Electrical power supply
6.14 Cable length
6.15 Maximum bake-out temperature
6.16 Dimensions of gauge head and controller
6.17 Mounting orientation
7 Additional (optional) specifications for Pirani gauge
7.1 Long-term instability
7.2 Relative sensitivity factor
7.3 Hysteresis
7.4 Response time
7.5 Inspection record and calibration certificate
7.6 Configuration
7.7 Weight
7.8 Storage and transport condition
7.9 Photographs
7.10 Maximum power consumption
7.11 Set point of pressure
8 Calibration and other measurement procedures
8.1 General
8.2 Conditions for calibrations
8.3 Assembly and adjustments of calibration item
8.4 Calibration
8.5 Measurement uncertainties during calibration
8.6 Calibration certificate
8.7 Measurement procedure for hysteresis
8.8 Measurement procedure of response time
9 Measurement uncertainties at use
Annex A (informative) Typical Pirani gauge
Bibliography
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Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 Symbols and abbreviated terms
5 Principle of Pirani gauge
6 Specifications for Pirani gauge
6.1 General
6.2 Measuring principle
6.3 Type of output
6.4 Range of output and output display resolution
6.5 Measurement range and full scale
6.6 Expected measurement uncertainty
6.7 Material exposed to gas
6.8 Connecting flange
6.9 Interface and pin-connections
6.10 Warm-up period
6.11 Compatibility between gauge tube and controller
6.12 Normal operating (environment) conditions
6.13 Electrical power supply
6.14 Cable length
6.15 Maximum bake-out temperature
6.16 Dimensions of gauge head and controller
6.17 Mounting orientation
7 Additional (optional) specifications for Pirani gauge
7.1 Long-term instability
7.2 Relative sensitivity factor
7.3 Hysteresis
7.4 Response time
7.5 Inspection record and calibration certificate
7.6 Configuration
7.7 Weight
7.8 Storage and transport condition
7.9 Photographs
7.10 Maximum power consumption
7.11 Set point of pressure
8 Calibration and other measurement procedures
8.1 General
8.2 Conditions for calibrations
8.3 Assembly and adjustments of calibration item
8.4 Calibration
8.5 Measurement uncertainties during calibration
8.6 Calibration certificate
8.7 Measurement procedure for hysteresis
8.8 Measurement procedure of response time
9 Measurement uncertainties at use
Annex A (informative) Typical Pirani gauge
Bibliography