ISO 18115-1:2023
Surface chemical analysis — Vocabulary — Part 1: General terms and terms used in spectroscopy
This document defines terms for surface chemical analysis. It covers general terms and those used in spectroscopy, while ISO 18115‑2 covers terms used in scanning-probe microscopy and ISO 18115‑3 covers terms used in optical interface analysis.
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Foreword
Introduction
1 Scope
2 Normative references
3 Terms related to general concepts in surface chemical analysis
4 Terms related to particle transport in materials
5 Terms related to the description of samples
6 Terms related to sample preparation
7 Terms related to instrumentation
8 Terms related to experimental conditions
9 Terms related to sputter depth profiling
10 Terms related to resolution
11 Terms related to electron spectroscopy methods
12 Terms related to electron spectroscopy analysis
13 Terms related to X-ray fluorescence, reflection and scattering methods
14 Terms related to X-ray fluorescence, reflection and scattering analysis
15 Terms related to glow discharge methods
16 Terms related to glow discharge analysis
17 Terms related to ion scattering methods
18 Terms related to ion scattering analysis
19 Terms related to surface mass spectrometry methods
20 Terms related to surface mass spectrometry analysis
21 Terms related to atom probe tomography
22 Terms related to multivariate analysis
Bibliography
Index
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Foreword
Introduction
1 Scope
2 Normative references
3 Terms related to general concepts in surface chemical analysis
4 Terms related to particle transport in materials
5 Terms related to the description of samples
6 Terms related to sample preparation
7 Terms related to instrumentation
8 Terms related to experimental conditions
9 Terms related to sputter depth profiling
10 Terms related to resolution
11 Terms related to electron spectroscopy methods
12 Terms related to electron spectroscopy analysis
13 Terms related to X-ray fluorescence, reflection and scattering methods
14 Terms related to X-ray fluorescence, reflection and scattering analysis
15 Terms related to glow discharge methods
16 Terms related to glow discharge analysis
17 Terms related to ion scattering methods
18 Terms related to ion scattering analysis
19 Terms related to surface mass spectrometry methods
20 Terms related to surface mass spectrometry analysis
21 Terms related to atom probe tomography
22 Terms related to multivariate analysis
Bibliography
Index