ISO 14644-2:2015
Cleanrooms and associated controlled environments — Part 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration
ISO 14644-2:2015 specifies minimum requirements for a monitoring plan for cleanroom or clean zone performance related to air cleanliness by particle concentration, based upon parameters that measure or affect airborne particle concentration.
ISO 14644-2:2015 does not address condition monitoring of aspects such as vibration or general maintenance of the engineering systems. It does not provide for monitoring of particle populations that are outside the specified lower threshold particle-size range, 0,1 µm to 5 µm. Concentrations of ultrafine particles (particles smaller than 0,1µm) will be addressed in a separate standard.
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Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 Creating, implementing and maintaining a monitoring plan
4.1 Principle
4.2 Risk assessment
4.3 Monitoring plan
4.4 Calibration
4.5 Review and approval
4.6 Response to a deviation during monitoring
5 Periodic classification of air cleanliness by particle concentration
Annex A (informative) Matters to consider when developing a monitoring plan
Annex B (informative) Considerations for setting alert and action levels
Bibliography
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Related Information
Similar Standards
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AS/NZS 14644.2:2002
Cleanrooms and associated controlled environments - Specifications for testing and monitoring to prove continued compliance with ISO 14644.1
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AS/NZS 14644.3:2009
Cleanrooms and associated controlled environments - Test methods
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AS/NZS ISO 14644.1:2002
Cleanrooms and associated controlled environments - Classification and air cleanliness
-
AS/NZS ISO 14644.4:2002
Cleanrooms and associated controlled environments - Design, construction and start-up
Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 Creating, implementing and maintaining a monitoring plan
4.1 Principle
4.2 Risk assessment
4.3 Monitoring plan
4.4 Calibration
4.5 Review and approval
4.6 Response to a deviation during monitoring
5 Periodic classification of air cleanliness by particle concentration
Annex A (informative) Matters to consider when developing a monitoring plan
Annex B (informative) Considerations for setting alert and action levels
Bibliography