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ISO 14644-2:2015

Current Date published:

Cleanrooms and associated controlled environments — Part 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration

ISO 14644-2:2015 specifies minimum requirements for a monitoring plan for cleanroom or clean zone performance related to air cleanliness by particle concentration, based upon parameters that measure or affect airborne particle concentration.

ISO 14644-2:2015 does not address condition monitoring of aspects such as vibration or general maintenance of the engineering systems. It does not provide for monitoring of particle populations that are outside the specified lower threshold particle-size range, 0,1 µm to 5 µm. Concentrations of ultrafine particles (particles smaller than 0,1µm) will be addressed in a separate standard.

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Related Information

Similar Standards

  • AS/NZS 14644.2:2002

    Cleanrooms and associated controlled environments - Specifications for testing and monitoring to prove continued compliance with ISO 14644.1

  • AS/NZS 14644.3:2009

    Cleanrooms and associated controlled environments - Test methods

  • AS/NZS ISO 14644.1:2002

    Cleanrooms and associated controlled environments - Classification and air cleanliness

  • AS/NZS ISO 14644.4:2002

    Cleanrooms and associated controlled environments - Design, construction and start-up

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Pages: 14

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ISO 14644-2:2015

Get this standard Prices exclude GST
PDF ( Single user document)
$179.13 NZD
HardCopy
$214.78 NZD
Networkable PDF
Price varies
Redline PDF
$179.13 NZD

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