AS/NZS ISO 14644.1:2002

AS/NZS ISO 14644.1:2002 CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - CLASSIFICATION AND AIR CLEANLINESS

PREFACE

CONTENTS

INTRODUCTION

1 Scope

2 Definitions

2.1 General

2.1.1 cleanroom

2.1.2 clean zone

2.1.3 installation

2.1.4 classification

2.2 Airborne particles

2.2.1 particle

2.2.2 particle size

2.2.3 particle concentration

2.2.4 particle size distribution

2.2.5 ultrafine particle

2.2.6 macroparticle

2.2.7 fibre

2.3 Descriptors

2.3.1 U descriptor

2.3.2 M descriptor

2.4 Occupancy states

2.4.1 as-built

2.4.2 at-rest

2.4.3 operational

2.5 Roles

2.5.1 customer

2.5.2 supplier

3 Classification

3.1 Occupancy state(s)

3.2 Classification number

3.3 Designation

4 Demonstration of compliance

4.1 Principle

4.2 Testing

4.3 Airborne particle concentration limits

4.4 Test report

Annex A - Graphical illustration of the classes of Table 1

Annex B - Determination of particulate cleanliness classification using a discrete-particle-counting, light-scattering instr

B.1 Principle

B.2 Apparatus requirements

B.3 Pretest conditions

B.4 Sampling

B.5 Recording of results

B.6 Interpretation of results

Annex C - Statistical treatment of particle concentration data

C.1 Rationale

C.2 Algorithm for computation of average particle concentration at a location

C.3 Algorithms for computation of 95% upper confidence limit

Annex D - Worked examples of classification calculations

D.1 Example 1

D.2 Example 2

Annex E - Considerations for the counting and sizing of particles outside the size range applicable for classification

E.1 Principle

E.2 Consideration of particles smaller than 0,1 µm (ultrafine particles) - U descriptor

E.3 Consideration of particles larger than 5 µm (macroparticles) - M descriptor

Annex F - Sequential sampling procedure

F.1 Background and limitations

F.2 Basis for the procedure

F.3 Procedure for sampling

Bibliography

APPENDIX ZA - ISO CLASSIFICATION SYSTEM

ZA1 GENERAL

ZA2 REFERENCES