ISO 14644-15:2017
Cleanrooms and associated controlled environments — Part 15: Assessment of suitability for use of equipment and materials by airborne chemical concentration
ISO 14644-15:2017 provides requirements and guidelines for assessing the chemical airborne cleanliness of equipment and materials which are foreseen to be used in cleanrooms and associated controlled environments which are linked to the ISO standard for cleanliness classes by chemical concentration (see ISO 14644‑8).
The following are outside the scope of ISO 14644-15:2017:
- health and safety requirements;
- compatibility with cleaning agents and techniques;
- cleanability;
- biocontamination;
- specific requirements of equipment and materials for processes and products;
- design details of equipment.
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Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 Symbols
5 Test setup
5.1 General
5.2 Closed design
5.3 Closed design special application
5.4 Open design
6 Representative mode
6.1 Equipment
6.2 Material
7 Visual inspection
7.1 General
7.2 Equipment
7.3 Material
8 Test description
9 Calculation of the measured concentrations
10 Calculation of specific emission rate
10.1 Calculation of specific emission rate — Closed design
10.2 Calculation of specific emission rate — Open design
11 Assessment
11.1 General
11.2 Required input data
11.3 Calculation to determine the effect on a cleanroom or controlled zone
11.4 Assessment of the suitability of material(s) or equipment for an existing cleanroom or controlled zone
12 Documentation
12.1 General
12.2 Common documentation requirements
12.3 Test documentation
12.4 Visual inspection
12.4.1 Equipment
12.4.2 Materials
Annex A (informative) Example calculation for suitability assessment of one equipment (existing installation)
Annex B (informative) Example calculation for suitability assessment of wall material (existing cleanroom/clean zone installation)
Annex C (informative) Suitability assessment of a combination of equipment and floor material in a cleanroom to be designed
Bibliography
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Related Information
Similar Standards
-
AS/NZS 14644.2:2002
Cleanrooms and associated controlled environments - Specifications for testing and monitoring to prove continued compliance with ISO 14644.1
-
AS/NZS 14644.3:2009
Cleanrooms and associated controlled environments - Test methods
-
AS/NZS ISO 14644.1:2002
Cleanrooms and associated controlled environments - Classification and air cleanliness
-
AS/NZS ISO 14644.4:2002
Cleanrooms and associated controlled environments - Design, construction and start-up
Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 Symbols
5 Test setup
5.1 General
5.2 Closed design
5.3 Closed design special application
5.4 Open design
6 Representative mode
6.1 Equipment
6.2 Material
7 Visual inspection
7.1 General
7.2 Equipment
7.3 Material
8 Test description
9 Calculation of the measured concentrations
10 Calculation of specific emission rate
10.1 Calculation of specific emission rate — Closed design
10.2 Calculation of specific emission rate — Open design
11 Assessment
11.1 General
11.2 Required input data
11.3 Calculation to determine the effect on a cleanroom or controlled zone
11.4 Assessment of the suitability of material(s) or equipment for an existing cleanroom or controlled zone
12 Documentation
12.1 General
12.2 Common documentation requirements
12.3 Test documentation
12.4 Visual inspection
12.4.1 Equipment
12.4.2 Materials
Annex A (informative) Example calculation for suitability assessment of one equipment (existing installation)
Annex B (informative) Example calculation for suitability assessment of wall material (existing cleanroom/clean zone installation)
Annex C (informative) Suitability assessment of a combination of equipment and floor material in a cleanroom to be designed
Bibliography