ISO 11775:2015
Surface chemical analysis — Scanning-probe microscopy — Determination of cantilever normal spring constants
ISO 11775:2015 describes five of the methods for the determination of normal spring constants for atomic force microscope cantilevers to an accuracy of 5 % to 10 %. Each method is in one of the three categories of dimensional, static experimental, and dynamic experimental methods. The method chosen depends on the purpose, convenience, and instrumentation available to the analyst. For accuracies better than 5 % to 10 %, more sophisticated methods not described here are required.
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Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 Symbols and abbreviated terms
5 General information
5.1 Background information
5.2 Methods for the determination of AFM normal spring constant
6 Dimensional methods to determine kz
6.1 General
6.2 kz using formulae requiring 3D geometric information
6.2.1 Method
6.2.2 Measuring the required dimensions and material properties of the cantilever
6.2.3 Determining kz for the rectangular cantilever
6.2.4 Determining kz for the V-shaped cantilever
6.2.5 kz for the trapezoidal cross-sections
6.2.6 kz to account for coatings
6.3 kz using plan view dimensions and resonant frequency for rectangular tipless cantilevers
6.3.1 Determining kz
6.3.2 Uncertainty
7 Static experimental methods to determine kz
7.1 General
7.2 Static experimental method with a reference cantilever
7.2.1 Set-up
7.2.2 Determining kz
7.2.3 Uncertainty
7.3 Static experimental method using a nanoindenter
7.3.1 General
7.3.2 Determining kz for a tipped or tipless cantilever
7.3.3 Uncertainty
7.4 Measurement methods
7.4.1 Static deflection calibration
8 Dynamic experimental methods to determine kz
8.1 General
8.2 Dynamic experimental method using thermal vibrations using AFM
8.2.1 Determining kz
8.2.2 Uncertainty
Annex A (informative) Inter-laboratory and intra-laboratory comparison of AFM cantilevers
Bibliography
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Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 Symbols and abbreviated terms
5 General information
5.1 Background information
5.2 Methods for the determination of AFM normal spring constant
6 Dimensional methods to determine kz
6.1 General
6.2 kz using formulae requiring 3D geometric information
6.2.1 Method
6.2.2 Measuring the required dimensions and material properties of the cantilever
6.2.3 Determining kz for the rectangular cantilever
6.2.4 Determining kz for the V-shaped cantilever
6.2.5 kz for the trapezoidal cross-sections
6.2.6 kz to account for coatings
6.3 kz using plan view dimensions and resonant frequency for rectangular tipless cantilevers
6.3.1 Determining kz
6.3.2 Uncertainty
7 Static experimental methods to determine kz
7.1 General
7.2 Static experimental method with a reference cantilever
7.2.1 Set-up
7.2.2 Determining kz
7.2.3 Uncertainty
7.3 Static experimental method using a nanoindenter
7.3.1 General
7.3.2 Determining kz for a tipped or tipless cantilever
7.3.3 Uncertainty
7.4 Measurement methods
7.4.1 Static deflection calibration
8 Dynamic experimental methods to determine kz
8.1 General
8.2 Dynamic experimental method using thermal vibrations using AFM
8.2.1 Determining kz
8.2.2 Uncertainty
Annex A (informative) Inter-laboratory and intra-laboratory comparison of AFM cantilevers
Bibliography