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ISO/TS 22933:2022

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Surface chemical analysis — Secondary ion mass spectrometry — Method for the measurement of mass resolution in SIMS

This document specifies a method for measuring the mass resolution in SIMS, and how to compare the mass resolution between different instruments (e.g. TOF-SIMS, Magnetic SIMS, Quadrupole SIMS, Fourier Transform SIMS, etc.) by considering the peak shapes.

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ISO/TS 22933:2022

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