ISO 17973:2016
Surface chemical analysis — Medium-resolution Auger electron spectrometers — Calibration of energy scales for elemental analysis
ISO 17973:2016 specifies a method for calibrating the kinetic energy scales of Auger electron spectrometers with an uncertainty of 3 eV, for general analytical use in identifying elements at surfaces. In addition, it specifies a method for establishing a calibration schedule. It is applicable to instruments used in either direct or differential mode, where the resolution is less than or equal to 0,5 % and the modulation amplitude for the differential mode, if used, is 2 eV peak-to-peak. It is applicable to those spectrometers equipped with an inert gas ion gun or other method for sample cleaning and with an electron gun capable of operating at 4 keV or higher beam energy.
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Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 Symbols and abbreviated terms
5 Outline of method
6 Energy scale calibration procedures
6.1 Obtaining reference samples
6.2 Mounting samples
6.3 Cleaning samples
6.4 Choosing spectrometer settings for energy calibration
6.5 Operating the instrument
6.6 Measurement of reference peaks
6.7 Determining measured kinetic energies of reference peaks
6.8 Determining correction of instrument kinetic energy scale
6.9 Next calibration
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Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 Symbols and abbreviated terms
5 Outline of method
6 Energy scale calibration procedures
6.1 Obtaining reference samples
6.2 Mounting samples
6.3 Cleaning samples
6.4 Choosing spectrometer settings for energy calibration
6.5 Operating the instrument
6.6 Measurement of reference peaks
6.7 Determining measured kinetic energies of reference peaks
6.8 Determining correction of instrument kinetic energy scale
6.9 Next calibration
Bibliography