ISO 16129:2018
Surface chemical analysis — X-ray photoelectron spectroscopy — Procedures for assessing the day-to-day performance of an X-ray photoelectron spectrometer
This document is designed to allow the user to assess, on a regular basis, several key parameters of an X‑ray photoelectron spectrometer. It is not intended to provide an exhaustive performance check, but instead provides a rapid set of tests that can be conducted frequently.
Aspects of instrument behaviour covered by this document include the vacuum, measurements of spectra of conductive or non-conductive test specimens and the current state of the X‑ray source. Other important aspects of the instrument performance (e.g. lateral resolution) fall outside the scope of this document.
The document is intended for use with commercial X‑ray photoelectron spectrometers equipped with a monochromated Al Kα X‑ray source or with an unmonochromated Al or Mg Kα X‑ray source.
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Foreword
Introduction
1 Scope
2 Normative references
3 Terms, definitions and abbreviations
4 Initial approach
5 Initial instrument calibration, alignment and assessment
6 Test specimen selection
6.1 General information
6.2 The conductive specimen
6.3 The non-conductive specimen
6.4 Specimen for assessing the X‑ray source
7 Collection of reference data
7.1 General information
7.2 Rapid test of the instrument using a conductive specimen
7.2.1 Specimen mounting and pre-treatment
7.2.2 Survey spectrum
7.2.3 High-resolution spectrum
7.3 Rapid test of the instrument using a non-conductive specimen
7.3.1 Specimen mounting and positioning
7.3.2 High-resolution spectrum
7.4 Rapid test of the X‑ray source using a phosphor specimen
7.5 Rapid test of the X‑ray source using a uniform conductive specimen
8 Collection of subsequent performance data
9 Analysis of the performance data
9.1 General information
9.2 Survey spectrum
9.3 High-resolution spectrum from the conductive specimen
9.4 High-resolution spectrum from the non-conductive specimen
9.5 Images from the phosphor specimen
9.6 Images from the uniform conductive specimen
9.7 Spectrum ratios
10 Control charts
Bibliography
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Foreword
Introduction
1 Scope
2 Normative references
3 Terms, definitions and abbreviations
4 Initial approach
5 Initial instrument calibration, alignment and assessment
6 Test specimen selection
6.1 General information
6.2 The conductive specimen
6.3 The non-conductive specimen
6.4 Specimen for assessing the X‑ray source
7 Collection of reference data
7.1 General information
7.2 Rapid test of the instrument using a conductive specimen
7.2.1 Specimen mounting and pre-treatment
7.2.2 Survey spectrum
7.2.3 High-resolution spectrum
7.3 Rapid test of the instrument using a non-conductive specimen
7.3.1 Specimen mounting and positioning
7.3.2 High-resolution spectrum
7.4 Rapid test of the X‑ray source using a phosphor specimen
7.5 Rapid test of the X‑ray source using a uniform conductive specimen
8 Collection of subsequent performance data
9 Analysis of the performance data
9.1 General information
9.2 Survey spectrum
9.3 High-resolution spectrum from the conductive specimen
9.4 High-resolution spectrum from the non-conductive specimen
9.5 Images from the phosphor specimen
9.6 Images from the uniform conductive specimen
9.7 Spectrum ratios
10 Control charts
Bibliography