ISO 11938:2012

Current Date published: 06/03/12

Microbeam analysis — Electron probe microanalysis — Methods for elemental-mapping analysis using wavelength-dispersive spectroscopy

This International Standard provides procedures for electron microprobe elemental-mapping analysis using

wavelength-dispersive spectrometry. The choice between mapping with the electron beam moving digitally

across the specimen (electron beam mapping) and mapping with stage movement only (large-area mapping) is

assessed. It describes five types of data processing: the raw X‑ray intensity data method, the k‑value method,

the calibration method, the correlation method and the matrix correction method.

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