ISO 13696:2022
Optics and photonics — Test method for total scattering by optical components
This document specifies procedures for the determination of the total scattering by coated and uncoated optical surfaces. Procedures are given for measuring the contributions of the forward scattering or backward scattering to the total scattering of an optical component.
This document applies to coated and uncoated optical components with optical surfaces that have a radius of curvature of more than 10 m. Measurement wavelengths covered by this document range from the ultraviolet above 250 nm to the infrared spectral region below 15 µm. For measurements in the deep ultraviolet between 190 nm to 250 nm, specific methods are considered and are described. Generally, optical scattering is considered as neglectable for wavelengths above 15 µm.
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Foreword
Introduction
1 Scope
2 Normative references
3 Terms, definitions and symbols
3.1 Terms and definitions
3.2 Symbols and units of measure
4 Test method
4.1 Principle
4.2 Measurement arrangement and test equipment
4.2.1 General
4.2.2 Radiation source
4.2.3 Beam preparation system
4.2.4 Integrating sphere
4.2.5 Detection system
4.2.6 Specimen holder
4.3 Arrangement with high sensitivity
4.4 Preparation of specimens
5 Procedure
5.1 General
5.2 Alignment procedure
5.2.1 General
5.2.2 Alignment of the beam
5.2.3 Alignment of the specimen
5.3 Measurement procedure
6 Evaluation
6.1 Determination of the total scattering value
6.2 Error budget
7 Test report
Annex A (informative) Set-up with a Coblentz hemisphere
Annex B (informative) Example of test report
Annex C (informative) Statistical evaluation example
Annex D (informative) Example for selection of spacing
Annex E (informative) Alternative method for calibrating total scatter measurements using a calcium fluoride diffuser disk
Bibliography
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Foreword
Introduction
1 Scope
2 Normative references
3 Terms, definitions and symbols
3.1 Terms and definitions
3.2 Symbols and units of measure
4 Test method
4.1 Principle
4.2 Measurement arrangement and test equipment
4.2.1 General
4.2.2 Radiation source
4.2.3 Beam preparation system
4.2.4 Integrating sphere
4.2.5 Detection system
4.2.6 Specimen holder
4.3 Arrangement with high sensitivity
4.4 Preparation of specimens
5 Procedure
5.1 General
5.2 Alignment procedure
5.2.1 General
5.2.2 Alignment of the beam
5.2.3 Alignment of the specimen
5.3 Measurement procedure
6 Evaluation
6.1 Determination of the total scattering value
6.2 Error budget
7 Test report
Annex A (informative) Set-up with a Coblentz hemisphere
Annex B (informative) Example of test report
Annex C (informative) Statistical evaluation example
Annex D (informative) Example for selection of spacing
Annex E (informative) Alternative method for calibrating total scatter measurements using a calcium fluoride diffuser disk
Bibliography