ISO/TS 80004-8:2020
Nanotechnologies — Vocabulary — Part 8: Nanomanufacturing processes
This document defines terms related to nanomanufacturing processes in the field of nanotechnologies.
All the process terms in this document are relevant to nanomanufacturing, however, many of the listed processes are not exclusively relevant to the nanoscale. Terms that are not exclusive are noted within the definitions. Depending on controllable conditions, such processes can result in material features at the nanoscale or, alternatively, at larger scales.
There are many other terms that name tools, components, materials, systems control methods or metrology methods associated with nanomanufacturing that are beyond the scope of this document.
Terms and definitions from other parts of the ISO/TS 80004 series are reproduced in Clause 3 for context and better understanding.
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Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 Terms related to general aspects
5 Terms related to directed assembly
6 Terms related to self-assembly processes
7 Terms related to synthesis
7.1 Gas process phase — Physical methods
7.2 Gas process phase — Chemical methods
7.2.1 Flame synthesis processes
7.2.2 Other terms
7.3 Liquid process phase — Physical methods
7.4 Liquid process phase — Chemical methods
7.5 Solid process phase — Physical methods
7.6 Solid process phase — Chemical methods
8 Terms related to fabrication
8.1 Nanopatterning lithography
8.2 Deposition processes
8.3 Etching processes
8.4 Printing and coating
Annex A (informative) Identification of output resulting from defined synthesis processes
Bibliography
Index
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Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 Terms related to general aspects
5 Terms related to directed assembly
6 Terms related to self-assembly processes
7 Terms related to synthesis
7.1 Gas process phase — Physical methods
7.2 Gas process phase — Chemical methods
7.2.1 Flame synthesis processes
7.2.2 Other terms
7.3 Liquid process phase — Physical methods
7.4 Liquid process phase — Chemical methods
7.5 Solid process phase — Physical methods
7.6 Solid process phase — Chemical methods
8 Terms related to fabrication
8.1 Nanopatterning lithography
8.2 Deposition processes
8.3 Etching processes
8.4 Printing and coating
Annex A (informative) Identification of output resulting from defined synthesis processes
Bibliography
Index