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ISO/TR 14999-3:2005

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Optics and photonics — Interferometric measurement of optical elements and optical systems — Part 3: Calibration and validation of interferometric test equipment and measurements

ISO/TR 14999-3:2005 discusses sources of error and the separation of errors into symmetric and non-symmetric parts. It also describes the reliance of measurements on the quality of a physical reference surface and the development of test procedures capable of achieving absolute calibration.

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Pages: 44

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Pages: 44

ISO/TR 14999-3:2005

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