ISO 20903:2019
Surface chemical analysis — Auger electron spectroscopy and X-ray photoelectron spectroscopy — Methods used to determine peak intensities and information required when reporting results
This document specifies the necessary information required in a report of analytical results based on measurements of the intensities of peaks in Auger electron and X-ray photoelectron spectra. Information on methods for the measurement of peak intensities and on uncertainties of derived peak areas is also provided.
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Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 Symbols and abbreviated terms
5 Methods for peak-intensity determination — direct spectrum
5.1 General
5.2 Selection and subtraction of an inelastic background
5.3 Measurement of peak intensity
5.3.1 Measurement of peak height
5.3.2 Measurement of peak area
5.4 Measurement of a peak intensity with computer software
5.5 Measurement of peak intensities for a spectrum with overlapping peaks
5.6 Uncertainty in measurement of peak area
6 Methods for peak intensity determination — Auger-electron differential spectrum
6.1 General
6.2 Measurement of Auger-electron differential intensity
6.3 Uncertainties in measurement of Auger-electron differential intensity
7 Reporting of methods used to measure peak intensities
7.1 General requirements
7.2 Methods used to determine peak intensities in direct spectra
7.2.1 Intensity measurement for a single peak, as described in 5.2 and 5.3
7.2.2 Intensity measurements from peak fitting, as described in 5.4 and 5.5
7.3 Methods used to obtain and determine peak intensities in Auger-electron differential spectra
7.3.1 Method used to obtain differential spectra
7.3.2 Method used to determine peak intensities, as described in 6.2
Annex A (informative) Instrumental effects on measured intensities
Annex B (informative) Useful integration limits for determination of peak intensities in XPS spectra
Bibliography
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Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 Symbols and abbreviated terms
5 Methods for peak-intensity determination — direct spectrum
5.1 General
5.2 Selection and subtraction of an inelastic background
5.3 Measurement of peak intensity
5.3.1 Measurement of peak height
5.3.2 Measurement of peak area
5.4 Measurement of a peak intensity with computer software
5.5 Measurement of peak intensities for a spectrum with overlapping peaks
5.6 Uncertainty in measurement of peak area
6 Methods for peak intensity determination — Auger-electron differential spectrum
6.1 General
6.2 Measurement of Auger-electron differential intensity
6.3 Uncertainties in measurement of Auger-electron differential intensity
7 Reporting of methods used to measure peak intensities
7.1 General requirements
7.2 Methods used to determine peak intensities in direct spectra
7.2.1 Intensity measurement for a single peak, as described in 5.2 and 5.3
7.2.2 Intensity measurements from peak fitting, as described in 5.4 and 5.5
7.3 Methods used to obtain and determine peak intensities in Auger-electron differential spectra
7.3.1 Method used to obtain differential spectra
7.3.2 Method used to determine peak intensities, as described in 6.2
Annex A (informative) Instrumental effects on measured intensities
Annex B (informative) Useful integration limits for determination of peak intensities in XPS spectra
Bibliography