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ISO 14644-6:2007

Withdrawn Date published:

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Cleanrooms and associated controlled environments — Part 6: Vocabulary

ISO 14644-6:2007 establishes a vocabulary of terms and definitions related to cleanrooms and associated controlled environments.

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Pages: 34

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Related Information

Similar Standards

  • AS/NZS 14644.2:2002

    Cleanrooms and associated controlled environments - Specifications for testing and monitoring to prove continued compliance with ISO 14644.1

  • AS/NZS 14644.3:2009

    Cleanrooms and associated controlled environments - Test methods

  • AS/NZS ISO 14644.1:2002

    Cleanrooms and associated controlled environments - Classification and air cleanliness

  • AS/NZS ISO 14644.4:2002

    Cleanrooms and associated controlled environments - Design, construction and start-up

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ISO 14644-6:2007

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