ISO 13084:2018
Surface chemical analysis — Secondary ion mass spectrometry — Calibration of the mass scale for a time-of-flight secondary ion mass spectrometer
This document specifies a method to optimize the mass calibration accuracy in time-of-flight secondary ion mass spectrometry (SIMS) instruments used for general analytical purposes. It is only applicable to time-of-flight instruments but is not restricted to any particular instrument design. Guidance is provided for some of the instrumental parameters that can be optimized using this procedure and the types of generic peaks suitable to calibrate the mass scale for optimum mass accuracy.
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Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 Symbols and abbreviated terms
4.1 Symbols
4.2 Abbreviated terms
5 Outline of method
6 Method for improving mass accuracy
6.1 Obtaining the reference sample for optimization
6.2 Preparation of polycarbonate sample
6.3 Obtaining the SIMS spectral data
6.4 Calculating mass accuracy
6.5 Optimizing instrumental parameters
6.6 Calibration procedure
Annex A (informative) Calibration uncertainty
Annex B (informative) Internal addition method
Bibliography
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Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 Symbols and abbreviated terms
4.1 Symbols
4.2 Abbreviated terms
5 Outline of method
6 Method for improving mass accuracy
6.1 Obtaining the reference sample for optimization
6.2 Preparation of polycarbonate sample
6.3 Obtaining the SIMS spectral data
6.4 Calculating mass accuracy
6.5 Optimizing instrumental parameters
6.6 Calibration procedure
Annex A (informative) Calibration uncertainty
Annex B (informative) Internal addition method
Bibliography