ISO 13084:2011
Surface chemical analysis — Secondary-ion mass spectrometry — Calibration of the mass scale for a time-of-flight secondary-ion mass spectrometer
ISO 13084:2011 specifies a method to optimize the mass calibration accuracy in time-of-flight SIMS instruments used for general analytical purposes. It is only applicable to time-of-flight instruments but is not restricted to any particular instrument design. Guidance is provided for some of the instrumental parameters that can be optimized using this procedure and the types of generic peaks suitable to calibrate the mass scale for optimum mass accuracy.
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Scope
Symbols and abbreviated terms
Symbols
Abbreviated terms
Outline of method
Method for improving mass accuracy
Obtaining the reference sample for optimization
Preparation of polycarbonate sample
Obtaining the SIMS spectral data
Calculating mass accuracy
Optimizing instrumental parameters
Calibration procedure
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Scope
Symbols and abbreviated terms
Symbols
Abbreviated terms
Outline of method
Method for improving mass accuracy
Obtaining the reference sample for optimization
Preparation of polycarbonate sample
Obtaining the SIMS spectral data
Calculating mass accuracy
Optimizing instrumental parameters
Calibration procedure